About: http://webisa.webdatacommons.org/403041068

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	???Large area??? refers to an area, such as the area of a receiving surface of a substrate used for device fabrication, greater than or equal to about 36 inches squared.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es