About: http://webisa.webdatacommons.org/4030711

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	cal qualities, lack of process control, etc. [0034] For very thin films, for example thinner than 10 nm, it is very difficult to realize precisely tailored profiles with conventional fabrication methods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com