About: http://webisa.webdatacommons.org/403236665

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 3 and 4 are a perspective view and a cross-sectional partial view, respectively, showing another vertical-type vapor deposition apparatus according to a prior art;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com