| http://www.w3.org/ns/prov#value | - Considering these summed differential values, various conditions for the transmission ratio of the 0-th order light listed in FIG. 8 are narrowed down to two conditions, i.e. 40% and 60%, and then the image of the true and false defects parts shown in FIG. 6 is acquired to determine the conditions of the transmission ratio of the 0-th order light for the actual inspection.
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