About: http://webisa.webdatacommons.org/403529706

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, one of the drawbacks of the conventional wafer handling machines is movement of the wafers within the wafer cassette.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es