About: http://webisa.webdatacommons.org/404008103

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate 13 disposed on a substrate table 14 is in this manner for example etched by the plasma.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com