About: http://webisa.webdatacommons.org/404256178

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a graph illustrating the spectral transmission (T) as a function of energy (E) for an AES photomask mateial of this invention for use at a lithographic wavelength of 193 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es