About: http://webisa.webdatacommons.org/404315976

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	1997Micron Technology, Inc.System for real-time control of semiconductor wafer polishing including o
http://www.w3.org/ns/prov#wasQuotedFrom	google.com