About: http://webisa.webdatacommons.org/404414130

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	With this method, a suitable gas or combination of gases is excited with microwave energy to form a plasma containing chemically reactive species such as ions, electrons and radicals.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com