About: http://webisa.webdatacommons.org/404451165

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a graph of total integrated scatter signal from 4H-SiC wafers as a function of etch time;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com