About: http://webisa.webdatacommons.org/404814927

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph correlating etch rate in the cleaning process to temperature inside a process chamber according to one embodiment of the present invention; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.es