About: http://webisa.webdatacommons.org/404904677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a plan view showing the state where an upstream-side opening and a downstream-side opening of the first chip in FIG. 1 are sealed with sealing members;
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk