About: http://webisa.webdatacommons.org/404928036

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a graph similar to FIG. 1 and further compares deposition rates of the tungsten according to hydrogen plasma etch embodiments of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com