| http://www.w3.org/ns/prov#value | - The protective film 180 is made of an organic material having an excellent planarization property and photosensitivity, and a low dielectric-constant insulating material having a dielectric constant of 4.0 or less formed with a plasma enhanced chemical vapor deposition (PECVD) such as a-Si:C:O and a-Si:O:F, or an inorganic material such as a silicon nitride and a silicon oxide.
|
