About: http://webisa.webdatacommons.org/405495055

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dielectric layer 52 can comprise, e.g., silicon oxides or nitrides, glasses, or polymeric materials, and can be deposited by evaporative techniques, CVD, PECVD, sputtering, or other techniques known in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com