About: http://webisa.webdatacommons.org/405534692

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon oxynitride film thus formed by this step has a thickness of, e.g. 10 to 30 nm and a nitrogen concentration of 5 to 20%.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com