About: http://webisa.webdatacommons.org/405607086

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The semiconductor package of claim 1 wherein the opening is a first opening, the substrate further comprising a second opening extending through the substrate between the first and second surfaces of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr