About: http://webisa.webdatacommons.org/405633733

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The diode according to claim 8, comprising an insulating film including shallow holes above the second deep holes, wherein the second filling regions are provided in the second deep holes and the shallow holes. 10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com