About: http://webisa.webdatacommons.org/405658216

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sensor element 705 has been micromachined in a silicon substrate, however, any appropriate material, such as silicon nitride and silicon dioxide, may be used for the fixed plate 704 and the sensor elements 705.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com