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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thickness of passivation film 4 may be, for example, 0.05 ??m or more and 1 ??m or less, and particularly preferably about 0.2 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com