About: http://webisa.webdatacommons.org/405790653

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The fluid, such as supercritical carbon dioxide with or without process chemistry, can enter the processing chamber at a peripheral edge of the substrate through one or more inlets coupled to the fluid flow system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com