About: http://webisa.webdatacommons.org/405871221

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process for producing a semiconductor substrate according to claim 16, wherein the region to be marked is an internal region of the supporting substrate where the semiconductor layer is not locally present. 21.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com