About: http://webisa.webdatacommons.org/405885509

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The parallel light is applied in the direction that is tilted at an angle of ?? to the normal of the base 61 on the plane including the longitudinal direction of the light shielding pattern 910 of the photomask 91.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com