About: http://webisa.webdatacommons.org/406036186

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, as illustrated in FIG. 5E, a region other than a region in which a p-MOS FET is to be formed is covered with photoresist 316.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com