About: http://webisa.webdatacommons.org/406051904

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The patternable low-k material of the present invention preferably includes a conductive metal, such as Cu or Al, embedded therein.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au