About: http://webisa.webdatacommons.org/40606862

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	TEG circuit 103 includes a test element region 1032 which has circuit elements such as a resistance element, a transistor element, and a capacitor for monitoring the process state, and a built-in test circuit 102.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com