About: http://webisa.webdatacommons.org/406077955

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The bottom layer 226a may be formed from n-doped polysilicon or other suitable materials, such as aluminum, titanium, and chromium.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com