About: http://webisa.webdatacommons.org/406196552

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The integrated micropotentiometer according to claim 1, wherein the material of said substrate is selected from a group including silicon, ceramic, silicon dioxide, silicon nitride, polyamide and similar materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com