About: http://webisa.webdatacommons.org/406227419

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposition of metal oxide may be performed by known techniques including the laser sputtering method, magnetron sputtering method, MBE (Molecular Beam Epitaxy) method and CVD (Chemical Vapor Deposition) method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com