About: http://webisa.webdatacommons.org/406484681

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein the surface is a semiconductor wafer surface, the first region is a first die or zone on the semiconductor wafer, and the second region is a second die or zone on the semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr