About: http://webisa.webdatacommons.org/406575866

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposited film includes at least one metal oxide having the formula: MxOy, wherein M is a first, second, or third row transition...
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com