About: http://webisa.webdatacommons.org/406603169

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When caplayer 12 is polysilicon, the removal step typically comprises a plasma generated from a gas mixture including HBr and Cl.sub.2.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com