About: http://webisa.webdatacommons.org/406853555

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention was completed with such a background as described above, and provides a technology capable of plating wafers more homogeneously than before when plating them by using a cup type plating apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com