About: http://webisa.webdatacommons.org/406920411

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The material of the substrate 20 is not particularly limited, and the substrate 20 may be made of insulating material, such as ceramic or resin, or semiconductive or conductive material, such as silicon wafer or metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com