About: http://webisa.webdatacommons.org/407001614

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The second structural layer portions 24 a and 24 b can be a material such as silicon and can be formed, for example, by CVD. In this embodiment, the second structural layer portions 24 a and 24 b are doped polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au