About: http://webisa.webdatacommons.org/407062959

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The stress modulation process may include ion implantation of a neutral species such as silicon, argon, germanium, and xenon.04-25-2013
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org