About: http://webisa.webdatacommons.org/407140932

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	16. The method of claim 1 implemented in a lithography tool wherein the object is a wafer stage and the artifacts are alignment marks.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com