About: http://webisa.webdatacommons.org/407181773

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon nitride can include constituents other than silicon and nitrogen, such as oxygen, provided that the material retains much of the high temperature stability and etch susceptibility of a pure silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com