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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a well-known film consisting mainly of silicon was formed by CVD and photolithographically patterned to form gate electrodes 207.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com