http://www.w3.org/ns/prov#value | - In one embodiment of the VCSP of the present invention, the material of the substrates 32 comprises a ceramic, such as silicon oxide, silicon carbide, G.A.S. quartz, alumina, aluminum nitride, or a laminate of one or more layers of the above materials such as is available from, e.g., Sumitomo Mining, Inc., or the Kyocera Corporation, both of Japan.
|