About: http://webisa.webdatacommons.org/407417633

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating layer is a single layer or a laminated layer by using an oxide material containing silicon or a nitride material containing silicon by a known method such as CVD, plasma CVD, sputtering, or spin coating.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com