About: http://webisa.webdatacommons.org/407431070

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The metalloamide vapor is then contacted with a substrate, preferably an electronic device such as a semiconductor device, under conditions of chemical vapor deposition, to form a multi-metallic layer on the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com