About: http://webisa.webdatacommons.org/407490286

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention generally relates to semiconductor processing, and in particular to a system for uniformly heating a photoresist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es