| http://www.w3.org/ns/prov#value | - The micro-cantilever device of claim 14 wherein the form of the pull-in voltage is VPI=kaxw0 yLz if the micro-cantilever device has one of a linear tapered width and a parabolic tapered width, wherein VPI is the pull-in voltage, k is a constant, a is a slope of the tapered width, and L is the length.
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