About: http://webisa.webdatacommons.org/407563971

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a novel method for preventing the passivation of dopant species in semiconductor materials by atomic hydrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es