About: http://webisa.webdatacommons.org/407591312

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 17 wherein the etch stop material is a polymeric material having etch resistant properties and the step of removing the etch stop layer comprises dissolving the etch stop material by chemical means.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au