About: http://webisa.webdatacommons.org/40765565

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Any materials including metals and silicone can be used to make the rotor and the stator as long as they can be formed by either an etching process or other micro-machining techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com