About: http://webisa.webdatacommons.org/407657244

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is to be noted that introduction of an impurity into the epitaxially grown film to form the first diffused layer may be carried out by any other method, except for ion implantation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com