About: http://webisa.webdatacommons.org/40785792

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, the Z stage actuator 140b is a motor that is located under the base plate 106.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com