| http://www.w3.org/ns/prov#value | - bstrate having a frontside surface and a substantially planar backside surface; and a plurality of vias through the substrate, the vias filled with a via material, including at least partially with a conductive material to establish a conductive path between the frontside surface and the backside surface, the backside surface of the substrate being substantially planar with respect to the via mate
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